AS
Andreas Sinn
Authored
2 records found
A six degree of freedom, magnetically levitated metrology platform is proposed and implemented to enable nano-scale measurements directly in a production environment by providing vibration isolation. The metrology platform maintains a constant distance between sample and nano-met
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Mechanical vibrations occuring in a production environment cause a relative motion between the sample and inspection tool that distorts measurements at the nanometer level. To overcome this problem, this paper proposes a metrology platform that maintains a constant relative dista
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