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R.A. Gonzalez

Conference paper (1)

1 records found

1

Modal Identification for Multivariable Motion Systems: Applied to a PrototypeWafer-Stage

Conference paper (2025) - Maarten Van Der Hulst (author) , R.A. Gonzalez (author) , Koen Classens (author) , Paul Tacx (author) , Nic Dirkx (author) , Jeroen Van De Wijdeven (author) , T.A.E. Oomen (author)