Area-selective deposition (ASD) enables the growth of materials on target regions of patterned substrates for applications in fields ranging from microelectronics to catalysis. Selectivity is often achieved through surface modifications aimed at suppressing or promoting the adsorption of precursor molecules. Here, we show instead that varying the surface composition can enable ASD by affecting surface diffusion rather than adsorption. Ru deposition from (carbonyl)-(alkylcyclohexadienyl)Ru and H2 produces smooth films on metal nitrides, and nanoparticles on SiO2. The latter form by surface diffusion and aggregation of Ru adspecies. Kinetic modeling shows that changing the surface termination of SiO2 from -OH to -CH3, and thus its surface energy, leads to larger and fewer nanoparticles because of a 1000-fold increase in surface diffusion rates. Kinetic Monte Carlo simulations show that even surface diffusion alone can enable ASD because adspecies tend to migrate from high- to low-diffusivity regions. This is corroborated by deposition experiments on three-dimensional (3D) TiN-SiO2 nanopatterns, which are consistent with Ru migrating from SiO2 to TiN. Such insights not only have implications for the interpretation of experimental results but may also inform new ASD protocols, based on chemical vapor and atomic layer deposition, that take advantage of surface diffusion.

A granular layer can form regular patterns, such as squares, stripes, and hexagons, when it is fluidized with a pulsating gas flow. These structures are reminiscent of the well-known patterns found in granular layers excited through vibration, but, contrarily to them, they have been hardly explored since they were first discovered. In this work, we investigate experimentally the conditions leading to pattern formation in pulsed fluidized beds and the dimensionless numbers governing the phenomenon. We show that the onset to the instability is universal for Geldart B (sandlike) particles and governed by the hydrodynamical parameters Γ=ua/(utφ) and f/fn, where ua and f are the amplitude and frequency of the gas velocity, respectively, ut is the terminal velocity of the particles, φ is the average solids fraction, and fn is the natural frequency of the bed. These findings suggest that patterns emerge as a result of a parametric resonance between the kinematic waves originating from the oscillating gas flow and the bulk dynamics. Particle friction plays virtually no role in the onset to pattern formation, but it is fundamental for pattern selection and stabilization.