The relative importance of thermal errors in precision machines has increased in recent years. The requirements on precision machines such as higher precision and higher productivity become more stringent over product generations. Improved precision of precision machines has increased the importance of thermal errors in precision machines. To increase the productivity of precision machines, more energy needs to be consumed in general, resulting in increased heat generation and thermal errors, and poorer precision performance. To further improve the precision of precision machines while achieving increased productivity at the same time, thermal errors in precision machines need to be studied and reduced further.