SA
S. Anzinger
3 records found
1
Correction to
Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)
Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article1, it was brought to our attention that two pressure values were not correctly copied from the submitted orig
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Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene’s suitability as a microphone diaphragm. The pot
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As a consequence of their high strength, small thickness, and high flexibility, ultrathin graphene membranes show great potential for pressure and sound sensing applications. This study investigates the performance of multi-layer graphene membranes for microphone applications in
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