n the rapidly evolving semiconductor industry, precise material characterization is crucial. This thesis focuses on enhancing Ion Beam Analysis (IBA), a pivotal tool in semiconductor characterization, through the integration of differential evolution optimization. This research proposes a single and multi spectra optimization algorithm approach controlled by a web application. Central to this work is a com- parative analysis of the proposed algorithms to simulated annealing and the DE algorithm proposed by Heller et al. [5]. This analysis shows a good performance of the proposed algorithms and a potential for industry application. The web application offers users a robust, user-friendly, and scalable interface for IBA optimization. By proposing and testing new IBA optimization methods, this thesis contributes significantly to semiconductor technology, offering new methods for material characterization at microscopic level.
This project is a joint project between Imec (Leuven, Belgium) and HZDR (Dresden, Germany).