Transition-edge-sensor (TES) microcalorimeters and bolometers are used for a variety of applications.The sensors are based on the steep temperature-dependent resistance of the normal-to-superconducting transition, and are thus intrinsically sensitive to magnetic fields. Conventionally the detectors are shielded from stray magnetic fields using external magnetic shields. However, in particular for applications with strict limits on the available space and mass of an instrument, external magnetic shields might not be enough to obtain the required shielding factors or field homogeneity. Additionally, these shields are only effective for magnetic fields generated external to the TES array, and are ineffective to mitigate the impact of internally generated magnetic fields. Here we present an alternative shielding method based on a super-conducting groundplane deposited directly on the backside of the silicon nitride membrane on which the TESs are located. We demonstrate that this local shielding for external magnetic fields has a shielding factor of at the least approximately 80, and is also effective at reducing internal self-induced magnetic fields, as demonstrated by measurements and simulation of the eddy current losses in our ac-biased detectors. Measurements of 5.9-keV x-ray photons show that our shielded detectors have a high resilience to external magnetic fields, showing no degradation of the energy resolution or shifts of the energy-scale calibration for fields of several microtesla, values higher than expected in typical real-world applications.@en

Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of Δ E < 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with (length × width) 140 × 30 μ m2 TiAu TESs, which have a 2.3 μ m thick Au absorber for X-ray photons. The pixels have a typical normal resistance Rn = 121 m Ω and a critical temperature Tc ∼ 90 mK. We performed extensive measurements on 60 pixels out of the array in order to show the uniformity of the array. We obtained an energy resolutions between 2.4 and 2.6 eV (FWHM) at 5.9 keV, measured in a single-pixel mode at AC bias frequencies ranging from 1 to 5 MHz, with a frequency domain multiplexing (FDM) readout system, which is developed at SRON/VTT. We also present the detector energy resolution at X-ray with different photon energies generated by a modulated external X-ray source from 1.45 keV up to 8.9 keV. Multiplexing readout across several pixels has also been performed to evaluate the impact of the thermal crosstalk to the instrument's energy resolution budget requirement. This value results in a derived requirement, for the first neighbour, that is less than 1;× 10-3 when considering the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 5.9 keV).

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We are developing a kilo-pixels Ti/Au TES array as a backup option for Athena X-IFU. Here we report on single-pixel performance of a 32 × 32 array operated in a Frequency Division Multiplexing (FDM) readout system, with bias frequencies in the range 1-5 MHz. We have tested the pixels response at several photon energies, by means of a 55Fe radioactive source (emitting Mn-Kα at 5.9 keV) and a Modulated X-ray Source (MXS, providing Cr-Kα at 5.4 keV and Cu-Kα at 8.0 keV). First, we report the procedure used to perform the detector energy scale calibration, usually achieving a calibration accuracy better than ∼0.5 eV in the 5.4-8.9 keV energy range. Then, we present the measured energy resolution at the different energies (best single pixel performance: ΔEFWHM = 2.40 ± 0.09 eV @ 5.4 keV; 2.53 ± 0.10 eV @ 5.9 keV; 2.78 ± 0.16 eV @ 8.0 keV), investigating also the performance dependency from the pixel bias frequency and the count rate. Thanks to long background measurements (∼1 d), we finally detected also the Al-Kα line at 1.5 keV, generated by fluorescence inside the experimental setup. We analyzed this line to obtain a first assessment of the single-pixel performance also at low energy (ΔEFWHM = 1.91 eV ± 0.21 eV @ 1.5 keV), and to evaluate the linearity of the detector response in a large energy band (1.5-8.9 keV).

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Superconducting transition-edge sensors (TESs) are highly sensitive detectors. Based on the outstanding performance on spectral resolution, the X-ray integral field unit (X-IFU) instrument on-board athena will be equipped with a large array of TES-based microcalorimeters. For optimal performance in terms of the energy resolution, it is essential to limit undesirable nonlinearity effects in the TES detector. Weak-link behavior induced on the TES by superconducting leads is such a nonlinearity effect. We designed and fabricated smart test structures to study the effect of the superconducting leads on the intrinsic transition curve of our TiAu-based TES bilayer. We measured and analyzed the resistance versus temperature transition curves of the test structures. We found relations of long-distance proximity effects with TES length and different lead materials. Based on these results, we can redesign and further optimize our TES-based X-ray detectors.

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We are developing a transition edge sensor (TES) microcalorimeter array based on a Ti/Au superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray observatory. The array is read out by a frequency-division multiplexing readout system using a 1–5 MHz frequency band. Extensive research collaborations between NASA/Goddard and SRON have led to new design rules for microcalorimeters such as low resistivity of the superconductor bilayer, moderately high ohmic resistance of the TES by changing the aspect ratio and no extra metal strips. We have improved our detector fabrication process according to these design principles and produced TES arrays. Although single-pixel characterizations of these arrays are ongoing, the best energy resolution of 2.0 eV for 5.9 keV X-ray has been observed with a 120 × 20 μm² TES with a normal resistance of 150 mΩ, biased at 2.2 MHz frequency. This shows that our Ti/Au TES array has a potential to fulfill the detector requirements of the X-IFU instrument.

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We give an overview of the baseline detector system for SAFARI, the prime focal-plane instrument on board the proposed space infrared observatory, SPICA. SAFARI's detectors are based on superconducting Transition Edge Sensors (TES) to provide the extreme sensitivity (dark NEP≤2×10-19W/√Hz) needed to take advantage of SPICA's cold (<8 K) telescope. In order to read out the total of ∼3500 detectors we use frequency domain multiplexing (FDM) with baseband feedback. In each multiplexing channel, a two-stage SQUID preamplifier reads out 160 detectors. We describe the detector system and discuss some of the considerations that informed its design.@en

SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and R_n of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

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The SAFARI Detector Test Facility is an ultra-low background optical testbed for characterizing ultra-sensitive prototype horn-coupled TES bolmeters for SAFARI, the grating spectrometer on board the proposed SPICA satellite. The testbed contains internal cold and hot black-body illuminators and a light-pipe for illumination with an external source. We have added reimaging optics to facilitate array optical measurements. The system is now being used for optical testing of prototype detector arrays read out with frequency-domain multiplexing. We present our latest optical measurements of prototype arrays and discuss these in terms of the instrument performance.@en

Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10^{- 19} W/Hz^{1 / 2} have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

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The next generation of far infrared space observatories will require extremely sensitive detectors that can be realized only by combining extremely low intrinsic noise with high optical efficiency. We have measured the broad-band optical response of ultra-sensitive transtion edge sensor (TES) bolometers (NEP ≈ 2 aW / Hz) in the 30-60-μm band where radiation is coupled to the detectors with a few-moded conical feedhorn and a hemispherical backshort. We show that these detectors have an optical efficiency of 60% (the ratio of the power detected by the TES bolometer to the total power propagating through the feedhorn). We find that the measured optical efficiency can be understood in terms of the modes propagating through the feedhorn with the aid of a spatial mode-filtering technique.@en