We present a novel silicon-based organ-on-chip (OoC) device featuring integrated microelectrodes to assess barrier function in biological tissue co-cultures. The microfluidic device consists of two vertically-stacked microchannels separated by a submicron-thin, microporous silicon nitride membrane, enabling in vivo-like proximity for co-cultured tissues. The integrated four-probe electrode geometry on slanted microchannel sidewalls ensures unobstructed optical access to the membrane and consistent measurement repeatability. Experimental validation through electrical impedance spectroscopy supported the device's sensitivity to sodium chloride concentration. Fabricated through a scalable, wafer-scale batch process, the device additionally demonstrated biocompatibility and optical transparency, representing a significant advancement for in situ tissue barrier assessments.

We present the fluidic and electrical packaging of a novel silicon-based trans-epithelial electrical resistance (TEER) sensor chip designed for a modular and standardized organ-on-chip (OoC) platform. The package comprises three key components: the housing of the TEER chip, microfluidic routing for seamless integration with the platform, and electrical connections to a platform-integrated potentiostat. This modular solution enables continuous impedance measurements while maintaining unobstructed optical access to the tissue culture region. Experiments confirmed leak-free fluid flow across the stacked microfluidic channels and stable sensitivity of TiN electrodes to PBS. The TEER module retains optical transparency, bi-ocompatibility, and industrial scalability, supporting advanced in situ tissue barrier assessments in standardized OoC systems.