Digital etching is an effective method to lower dry etch damages in A1GaN/GaN HEMTs. This work systematically investigated O₂-plasma-based digital etching of AlGaN and p-GaN. AlN layers were used as the etch stop layers in the AlGaN etch. Important process aspects such as the use of the AlN layers, the RF power, the oxygen flow rate, the oxidation time and the resulting roughness were studied. These are technically relevant to obtain controllable, uniform etch surfaces with low surface damages for better HEMT performance.

O₂ plasma-based digital etching of Al_0.25Ga_0.75N with a 0.8 nm AlN spacer on GaN was investigated using an inductively coupled plasma etcher. Silicon oxide layer was used as the hard mask. At 40 W RF bias power and 40 sccm oxygen flow, the etch depth of Al_0.25Ga_0.75N was 5.7 nm per cycle. The 0.8 nm AlN spacer layer acted as an etch-stop layer in three cycles. The surface roughness improved from 0.66 to 0.33 nm after the three and seven digital etch cycles. Compared to the dry etch only approach, this technique smoothed the surface instead of causing surface roughening. Compared to the selective thermal oxidation with a wet etch approach, this method is less demanding on the epitaxial growth and saves the oxidation process. It was shown to be effective in precisely controlling the AlGaN etch depth required for recessed-AlGaN HEMTs.