Acoustic-structural interactions present significant engineering challenges, particularly in the domains of noise reduction and vibration control. At ASML, measurement-based analyses have revealed that acoustic disturbance paths often dominate the dynamic behavior of atmospheric lithography machines. This project focuses on enhancing ASML’s current one-way coupled acoustic-structural modelling approach by developing a two-way coupled, known as vibro-acoustic, modelling framework. However, this advancement introduces substantial computational complexity, necessitating effective model reduction techniques. The primary objective of this work is to reduce vibro-acoustic models in a way that preserves their ability to be modularly coupled with other system components. To this end, three Component Mode Synthesis (CMS)-based reduction methods were evaluated, with only one proving suitable for both academic and industry-scale models. The resulting reduced-order models successfully retained the dynamic fidelity of the full system and enabled efficient coupling with other substructures. When applied to harmonic excitation analyses, the reduced models achieved a dramatic reduction in computational time, from several hours to approximately one minute, while accounting for the cost of model reduction.