JB
J. Bueno Lopez
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Bachelor thesis
(2026)
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Diana Al Bazze, Lisanne Laldjising, Nuria Llombart Juan, Juan Bueno Lopez, Huasheng Zhang
This project investigates the dielectric properties of various dielectrics in the sub-THz domain by determining their electric permittivity and loss tangent. The samples and corresponding thicknesses within the scope are: WavePro (4.00, 4.02, 4.03 mm); silicon with holes (300 μm); silicon/Suex soft-baked (300 and 200 μm); silicon/Suex hard-baked (300 and 200 μm); silicon/Parylene N (500 and 104 μm); silicon/Parylene C (500 and 114 μm); and silicon/ParyFree (500 and 113 μm).
The measurements are carried out using THz time-domain spectroscopy, after which the relevant parameters are extracted by means of ratio-fitting in the frequency domain. This is achieved by applying a Fourier Transform to the measurement data and optimizing a defined error function between the spectral measurement information and theoretical models.
The models are distinguished by the thickness of the sample. Subsequently, ‘thin’, ‘thick’, and ‘thin-thin’ models are defined, where the latter corresponds to a model for a two-layer dielectric. The extraction is proven to be significantly reliable for thick samples (i.e. WavePro) and low-resistivity/lossy thin samples (silicon). This is not the case for low-loss thin samples, as it is argued that the extraction of such a small loss tangent falls outside the tolerance of the methods used.
Therefore, the characterization of the dielectric layers is considered non-reliable, except for Parylene N and Parylene C (to a certain extent). For a concise overview of the results, the reader is referred to Table 6.1.
...
The measurements are carried out using THz time-domain spectroscopy, after which the relevant parameters are extracted by means of ratio-fitting in the frequency domain. This is achieved by applying a Fourier Transform to the measurement data and optimizing a defined error function between the spectral measurement information and theoretical models.
The models are distinguished by the thickness of the sample. Subsequently, ‘thin’, ‘thick’, and ‘thin-thin’ models are defined, where the latter corresponds to a model for a two-layer dielectric. The extraction is proven to be significantly reliable for thick samples (i.e. WavePro) and low-resistivity/lossy thin samples (silicon). This is not the case for low-loss thin samples, as it is argued that the extraction of such a small loss tangent falls outside the tolerance of the methods used.
Therefore, the characterization of the dielectric layers is considered non-reliable, except for Parylene N and Parylene C (to a certain extent). For a concise overview of the results, the reader is referred to Table 6.1.
...
This project investigates the dielectric properties of various dielectrics in the sub-THz domain by determining their electric permittivity and loss tangent. The samples and corresponding thicknesses within the scope are: WavePro (4.00, 4.02, 4.03 mm); silicon with holes (300 μm); silicon/Suex soft-baked (300 and 200 μm); silicon/Suex hard-baked (300 and 200 μm); silicon/Parylene N (500 and 104 μm); silicon/Parylene C (500 and 114 μm); and silicon/ParyFree (500 and 113 μm).
The measurements are carried out using THz time-domain spectroscopy, after which the relevant parameters are extracted by means of ratio-fitting in the frequency domain. This is achieved by applying a Fourier Transform to the measurement data and optimizing a defined error function between the spectral measurement information and theoretical models.
The models are distinguished by the thickness of the sample. Subsequently, ‘thin’, ‘thick’, and ‘thin-thin’ models are defined, where the latter corresponds to a model for a two-layer dielectric. The extraction is proven to be significantly reliable for thick samples (i.e. WavePro) and low-resistivity/lossy thin samples (silicon). This is not the case for low-loss thin samples, as it is argued that the extraction of such a small loss tangent falls outside the tolerance of the methods used.
Therefore, the characterization of the dielectric layers is considered non-reliable, except for Parylene N and Parylene C (to a certain extent). For a concise overview of the results, the reader is referred to Table 6.1.
The measurements are carried out using THz time-domain spectroscopy, after which the relevant parameters are extracted by means of ratio-fitting in the frequency domain. This is achieved by applying a Fourier Transform to the measurement data and optimizing a defined error function between the spectral measurement information and theoretical models.
The models are distinguished by the thickness of the sample. Subsequently, ‘thin’, ‘thick’, and ‘thin-thin’ models are defined, where the latter corresponds to a model for a two-layer dielectric. The extraction is proven to be significantly reliable for thick samples (i.e. WavePro) and low-resistivity/lossy thin samples (silicon). This is not the case for low-loss thin samples, as it is argued that the extraction of such a small loss tangent falls outside the tolerance of the methods used.
Therefore, the characterization of the dielectric layers is considered non-reliable, except for Parylene N and Parylene C (to a certain extent). For a concise overview of the results, the reader is referred to Table 6.1.