Integrated superconducting spectrometer (ISS) technology will enable ultra-wideband, integral-field spectroscopy for (sub)millimeter-wave astronomy, in particular, for uncovering the dust-obscured cosmic star formation and galaxy evolution over cosmic time. Here, we present the development of DESHIMA 2.0, an ISS for ultra-wideband spectroscopy toward high-redshift galaxies. DESHIMA 2.0 is designed to observe the 220–440 GHz band in a single shot, corresponding to a redshift range of z = 3.3–7.6 for the ionized carbon emission ([C II] 158 μ m). The first-light experiment of DESHIMA 1.0, using the 332–377 GHz band, has shown an excellent agreement among the on-sky measurements, the laboratory measurements, and the design. As a successor to DESHIMA 1.0, we plan the commissioning and the scientific observation campaign of DESHIMA 2.0 on the ASTE 10-m telescope in 2023. Ongoing upgrades for the full octave-bandwidth system include the wideband 347-channel chip design and the wideband quasi-optical system. For efficient measurements, we also develop the observation strategy using the mechanical fast sky-position chopper and the sky-noise removal technique based on a novel data-scientific approach. In the paper, we show the recent status of the upgrades and the plans for the scientific observation campaign.@en

Drude's description of the response of low-temperature gallium arsenide to optical pulse excitation is used to evaluate the components of a time-domain Norton equivalent circuit of a photoconductive antenna (PCA) source. The saturation of the terahertz (THz) radiated power occurring at large optical excitation levels was previously associated by the scientific community to radiation and charge screening of the bias. With the present circuit, we are able to model accurately the measured saturation as only due to the EM feedback from the antenna to the bias. The predicted THz radiated power is shown to match very accurately the measurements when the circuit is combined with an accurate description of the experimental conditions and the modeling of the THz quasi-optical (QO) channel.@en

There is an increasing demand for large format detector arrays with large bandwidths and high antenna efficiencies for future THz astronomical radiometric applications. For direct detection instruments, it is also desired to have antennas with dual polarization reception in order to increase the received power from incoherent sources, thereby improving the observing speed of the instrument. The main goal of this work is the validation of the incoherent detection of two orthogonal polarizations by a leaky lens antenna, coupled to a single Microwave Kinetic Inductance Detector (MKID). Depending on the absorbed power over a distributed transmission line, the resonant frequency of the MKID changes. The proposed antenna is composed of two crossed leaky wave slots feeding a silicon extended hemispherical lens. The slots are coupled to four aluminum (Al) coplanar waveguide (CPW) lines that incoherently absorb the incoming THz radiation. The antenna and the power absorbing CPW lines are embedded inside the MKID, allowing an efficient radiation detection at THz frequencies where no lossless superconductors are available. The proposed dual-polarized device absorbs power incrementally over four different CPWs incoherently and is therefore simulated in reception (deriving a plane-wave response) similarly to what is done in distributed absorbers. We compare numerically and experimentally the proposed dual-polarized leaky lens coupled MKID and its single polarization counterpart and show that the dual polarized device receives twice as much power as the single-polarized one. Eventually, the dual-polarized device, when used with air-bridges, provides the same angular selectivity and twice the throughput of the single-polarized one.@en

In this paper, we present an experimental strategy to analyze the harmonic content of mm-wave frequency extenders using the VNA (absolute) power calibration step, without requiring spectrum analyzers and/or separate downconverters. The spectral purity of the upconverted band of the extenders is a key requirement to enable entirely software-based power control required for the accurate analysis of an (active) device under test. The proposed approach is based on the complementary response provided by the calorimeter-based power meter (i.e. VDI PM5) capable of integrating the entire spectral content of the waveguide band, in respect to the extreme frequency selectivity of the narrow-band mixer-based downconverter of the VNA. This complementary integration bandwidth response allows to compare the two results at each input drive level (at the power calibration setup, in-situ) and link the difference to the increased harmonic content contribution, with respect to the spectral content value at the saturation drive level, i.e. nominal manufacturer specified. The paper presents tests carried out in the WR10 (75–110 GHz) and WR6 band (110–170 GHz). The WR10 resulted in a harmonic contribution on the total output power of a maximum of 0.3 dB down to -33 dBc power back off from saturation level, and less than 1 dB down to -38 dBc while the WR6 the same parameter is less than 1 dB over the entire frequency band excluding the lower frequency points.@en

Photoconductive antennas (PCAs) are used for imaging and sensing applications because of their ability to radiate short pulses with large bandwidths in the THz regime. The characterization of PCAs has previously been done using a time-domain Norton equivalent circuit. Thanks to a recent contribution, the size of the excited photoconductive area of PCAs that results in an impedance match with the antenna can be determined analytically using only the available optical power and the material parameters of the photoconductor. Through the impedance matching, the radiated THz power is maximized. These insights are used for the dimensioning of a wide-band photoconductive connected array to be used in the low THz band, excited by a high power laser (∼1W).@en

Photoconductive antennas (PCAs) are promising candidates for sensing and imaging systems. We have investigated their properties under pulsed laser illumination both in transmission and reception. First, a transmitting PCA has been characterized including a power measurement. Then, a Quasi-Optical (QO) link between a transmitter and a receiver was modelled and analyzed. In this work, we characterize this link with measurement. We use bow-tie based PCAs as examples, and measure the radiated power of the transmitter and the detected current of the receiver. The measurement shows very good agreement with the simulation.@en

This contribution presents the development of an electrically small lens antenna using an artificially loaded thermoplastic at 140-170GHz. We will present the on-going development of the Fly’s Eye front end antenna concept that was presented in [1]. The antenna is composed on a dual plastic lens, a core lens and a shell lens, fed by a double slot. The core-lens, being presented in this contribution, is a spherical lens made from an artificially loaded plastic of permittivity 9.5. To the best of our knowledge, this thermoplastic material has not been used for lens antennas in this frequency range before. A 4mm lens prototype has been developed using this material, which includes an antireflective layer synthesized by drilling sub-wavelength holes on the lens contour. Full-wave simulations show a negligible degradation of the performance of the anti-reflection layer compared to an ideal homogeneous matching layer. Physical measurements and antenna measurements confirm that the antenna's performance matches the design specifications.@en

We present the design, fabrication and characterization of a broadband lossless matching layer for silicon lens arrays. The proposed matching layer is based on silicon frusta (truncated pyramids) on top of the lens array fabricated by means of laser ablation. This matching layer is advantageous over quarter-wavelength dielectric matching layers since it covers more than an octave of bandwidth. We compare the performance of this matching layer with the commonly-used parylene-C matching layer at the center of the targetted band (500 GHz) in a lens-antenna integrated system. We measure a 1.6 dB higher transmission of the proposed silicon frusta matching compared to the parylene-C matching layer.@en

This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up to 500μ m-deep vias. Full conformality of Al sputtering was made possible by shaping the vias with a tailored hourglass profile, which allowed a metallic layer as thick as 430 nm to be deposited in the center of the vias. Single-via electric resistance as low as 160 mΩ at room temperature and superconductivity at 1.27 K were measured by a three-dimensional (3D) cross-bridge Kelvin resistor structure. This work establishes a CMOS-compatible fabrication process suitable for arrays of superconducting TSVs and 3D integration of superconducting silicon-based devices. [2020-0354].@en

State-of-the-art THz pulsed commercial systems operating over large bandwidth suffer from high dispersion or low radiation efficiency due to the poor coupling between the transmitter and receiver photoconductive antennas (PCAs). In this work, we present the fabrication and characterization of a leaky-lens PCA that has the potential to solve this problem. The presented PCA is based on a low-temperature grown gallium arsenide (LT-GaAs) membrane with a 1:15 bandwidth coverage (0.1-1.5 THz), where the frequency response is constant. In order to fabricate the PCA on an LT-GaAs membrane, a novel fabrication process is developed. This process is dramatically faster than previously used processes (∼1.5 h instead of ∼20 h). Furthermore, an experimental validation of the radiated power together with the comparison to a standard bow-tie-based PCA fabricated on the same LT-GaAs wafer is shown in this article. We show that the PCA source on the LT-GaAs membrane is more efficient due to the enhanced leaky wave radiation. The leaky-lens PCA stands out as a great candidate to improve the coupling efficiency in THz pulsed commercial systems, where the maximum laser power that can be used is limited by the dispersion in the optic fiber.@en

The time evolution of voltages and currents in a pulsed photo conductive antenna (PCA) source is evaluated resorting to a rigorous procedure that stems from semiconductor physics first, to define the phenomena involved in the generation of the photocurrent, and then relies on an equivalent circuit in time domain, providing a direct estimation of the power generated by the PCA as well as its spectral distribution. The circuit model is validated via a campaign of measurements of standard PC antenna sources. The saturation phenomena in the THz radiated power occurring at large optical excitation levels, previously observed by the scientific community and associated to different phenomena, are accurately predicted by the present method, which ascribe their main cause to the feedback from the antenna: indeed, the electromagnetic field generated by the device tend to reduce the strength of the forcing field used to accelerate the photo-carriers.@en

We present the design, fabrication, and full characterisation (sensitivity, beam pattern, and frequency response) of a background limited broadband antenna coupled kinetic inductance detector covering the frequency range from 1.4 to 2.8 THz. This device shows photon noise limited performance with a noise equivalent power of 2.5 × 10-19W/Hz1/2 at 1.55 THz and can be easily scaled to a kilo-pixel array. The measured optical efficiency, beam pattern, and antenna frequency response match very well the simulations.@en

This paper presents the fabrication and electrical characterization of superconducting high-aspect ratio through-silicon vias DC-sputtered with aluminum. Fully conformal and void-free coating of 300 μm-deep and 50 μmwide vias with Al, a CMOS-compatible and widely available superconductor, was made possible by tailoring a funneled sidewall profile for the axisymmetric vias. Single-via electric resistance as low as 80.44 mΩ at room temperature and superconductivity below 1.28 K were measured by a crossbridge Kelvin resistor structure. This work thus demonstrates the fabrication of functional superconducting interposer layers, suitable for high-density 3D integration of silicon-based quantum computing architectures.@en

This contribution presents the design and sub-mm wave measurements of a wideband dual polarized leaky lens antenna coupled to kinetic inductance detector (KIDs) to be specifically used for tightly spaced focal plane arrays. The antenna is planar and composed by two crossed slots, fed by two orthogonal coplanar waveguide (CPW) lines. In transmission, the crossed CPW lines are fed differentially in order to couple the radiation into the slots. The slot antenna feeds a dielectric lens to achieve directive patterns. The main goal of this work is to show the measurement results of the patterns and efficiency, and compare this antenna with its singly polarized version. The measured received power from an incoherent source is increased by a factor of 2 compared to a single-polarized version of the antenna.@en

We describe a microfabrication process that, thanks to a specifically tailored sidewall profile, enables for the first-time wafer-scale arrays of high-aspect ratio through-silicon vias (TSVs) coated with DC-sputtered Aluminum, achieving at once superconducting and CMOS-compatible 3D interconnects. Void-free conformal coating of up to 500μm-deep and 50μm-wide vias with a mere 2μm-thick layer of Al, a widely available metal in for IC manufacturing, was demonstrated. Single-via electric resistance as low as 468 mΩ at room temperature and superconductivity at 1.25 K were measured by a cross-bridge Kelvin resistor structure. This work establishes the fabrication of functional superconducting interposers suitable for 3D integration of high-density silicon-based quantum computing architectures.@en

Microwave kinetic inductance detectors (MKIDs) promise high sensitivity, combined with device simplicity and intrinsic multiplexibility. We demonstrate in this paper the realization of an imaging system consisting of an array of 961 antenna-coupled MKIDs that is read out using a single pair of coax cables and an analogue-digital back-end with a 2 GHz readout bandwidth. We measure the optical NEP of the central pixels of the array and find NEP = 510 -19 w/Vhz. The electrical NEP is measured for all pixels, giving NEP = 3.3 ± 1.310 -19 W/VHz for 85% of the pixels. We further obtain an instantaneous dynamic range of a factor 1000 and a cosmic ray dead time of 0.5% in the lab, resulting in 25% dead time when operated in a spacecraft at L2.@en

Microwave kinetic inductance detectors (MKIDs) promise high sensitivity, combined with device simplicity and intrinsic multiplexibility. We demonstrate in this paper the realization of an imaging system consisting of an array of 961 antenna-coupled MKIDs that is read out using a single pair of coax cables and an analogue-digital back-end with a 2 GHz readout bandwidth. We measure the optical NEP of the central pixels of the array and find NEP = 510 -19 w/Vhz. The electrical NEP is measured for all pixels, giving NEP = 3.3 ± 1.310 -19 W/VHz for 85% of the pixels. We further obtain an instantaneous dynamic range of a factor 1000 and a cosmic ray dead time of 0.5% in the lab, resulting in 25% dead time when operated in a spacecraft at L2.@en

Microwave Kinetic Inductance Detectors (MKIDs) are becoming a very promising candidate for next generation imaging instruments for the far infrared. A MKID consists of a superconducting resonator coupled to a feed-line used for the readout. In the devices presented here radiation coupling is achieved by coupling the MKID directly to planar antenna. The antenna is placed in the focus of an elliptical lens to increase the filling factor and to match efficiently to fore-optics. In this paper we present the design and the optical performance of MKIDs optimized for operation at 350 GHz. We have measured a device consisting of 14 pixels, characterized the coupling efficiency, antenna-lens frequency response and beam pattern and compared these to theoretical simulations. The optical efficiency has been measured by means of a black body radiator mounted in an ADR cryostat, through the variation of the black body temperature a variable illumination of each pixel (from 0.1 fW to 2 pW) is achieved. The frequency response and beam pattern have been directly measured in a He3 cryostat directly via the cryostat window and without the use of intermediate optics.@en

Photoconductive antennas (PCAs) are promising candidates for sensing and imaging applications. In recent years, our group has investigated their properties under pulsed laser illumination in transmission using a time-domain (TD) Norton equivalent circuit. Here, we extend this analysis to the link between a photoconductive source and a receiver introducing for the latter a second TD Norton equivalent circuit. We also evaluate the transfer function of a dispersive quasi-optical (QO) link. Specifically, a field correlation approach based on the high-frequency techniques is used to evaluate the spectral transfer function between two bow-tie-based PCAs, including the QO link. The detected currents in the receiving circuit are reconstructed using stroboscopic sampling of the modeled THz pulses, equivalent to what is actually performed by THz TD systems. Both the amplitude and the waveforms of these currents are evaluated. The QO link is then experimentally characterized to validate the proposed methodology. The comparison between the simulations and the measurements is excellent.@en