Low-loss deposited dielectrics will benefit superconducting devices such as integrated superconducting spectrometers, superconducting qubits, and kinetic inductance parametric amplifiers. Compared with planar structures, multilayer structures such as microstrips are more compact and eliminate radiation loss at high frequencies. Multilayer structures are most easily fabricated with deposited dielectrics, which typically exhibit higher dielectric loss than crystalline dielectrics. We measure the subkelvin and low-power microwave and millimeter-submillimeter-wave dielectric loss of hydrogenated amorphous silicon carbide (a-SiC:H), using superconducting chips with Nb-Ti-N/a-SiC:H/Nb-Ti-N microstrip resonators. We deposit the a-SiC:H by plasma-enhanced chemical vapor deposition at a substrate temperature of 400°C. The a-SiC:H has a millimeter-submillimeter loss tangent ranging from 0.9×10-4 at 270 GHz to 1.5×10-4 at 385 GHz. The microwave loss tangent is 3.1×10-5. These are the lowest low-power subkelvin loss tangents that have been reported for microstrip resonators at millimeter-submillimeter and microwave frequencies. The a-SiC:H films are free of blisters and have low stress: -20 MPa compressive at 200-nm thickness to 60 MPa tensile at 1000-nm thickness. @en

DESHIMA 2.0 is a spectrometer for astronomical applications targeting sources at sub-mm wavelengths from 240GHz to 720GHz. The design for its wide band Quasi-Optical system was presented in the previous works. In this work, the experimental validation of the beam pattern of the system at the lower end of its frequency band is presented. The measurement for the complete frequency band of the system is ongoing and will be presented at the conference.@en

Aims. Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1-10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in observing speed of many orders of magnitude. A spectroscopic instrument on such an observatory requires large arrays of detectors with a sensitivity expressed as a noise equivalent power NEP = 3 × 10-20 W√ p Hz. Methods. We present the design, fabrication, and characterisation of microwave kinetic inductance detectors (MKIDs) for this frequency range reaching the required sensitivity. The devices are based on thin-film NbTiN resonators which use lens-antenna coupling to a submicron-width aluminium transmission line at the shorted end of the resonator where the radiation is absorbed. We optimised the MKID geometry for a low NEP by using a small aluminium volume of ≈1 μm3 and fabricating the aluminium section on a very thin (100 nm) SiN membrane. Both methods of optimisation also reduce the effect of excess noise by increasing the responsivity of the device, which is further increased by reducing the parasitic geometrical inductance of the resonator. Results. We measure the sensitivity of eight MKIDs with respect to the power absorbed in the detector using a thermal calibration source filtered in a narrow band around 1.5 THz. We obtain a NEPexp(Pabs) = 3:1 ± 0:9 × 10-20 W√ p Hz at a modulation frequency of 200 Hz averaged over all measured MKIDs. The NEP is limited by quasiparticle trapping. Conclusions. The measured sensitivity is sufficient for spectroscopic observations from future, actively cooled space-based observatories. Moreover, the presented device design and assembly can be adapted for frequencies up to ≈10 THz and can be readily implemented in kilopixel arrays. @en

Aims. Future astrophysics and cosmic microwave background space missions operating in the far-infrared to millimetre part of the spectrum will require very large arrays of ultra-sensitive detectors in combination with high multiplexing factors and efficient low-noise and low-power readout systems. We have developed a demonstrator system suitable for such applications. Methods. The system combines a 961 pixel imaging array based upon Microwave Kinetic Inductance Detectors (MKIDs) with a readout system capable of reading out all pixels simultaneously with only one readout cable pair and a single cryogenic amplifier. We evaluate, in a representative environment, the system performance in terms of sensitivity, dynamic range, optical efficiency, cosmic ray rejection, pixel-pixel crosstalk and overall yield at an observation centre frequency of 850 GHz and 20% fractional bandwidth. Results. The overall system has an excellent sensitivity, with an average detector sensitivity (NEPdet) =3 × 10-19 W/Hz measured using a thermal calibration source. At a loading power per pixel of 50 fW we demonstrate white, photon noise limited detector noise down to 300 mHz. The dynamic range would allow the detection of ~1 Jy bright sources within the field of view without tuning the readout of the detectors. The expected dead time due to cosmic ray interactions, when operated in an L2 or a similar far-Earth orbit, is found to be <4%. Additionally, the achieved pixel yield is 83% and the crosstalk between the pixels is <-30 dB. Conclusions. This demonstrates that MKID technology can provide multiplexing ratios on the order of a 1000 with state-of-the-art single pixel performance, and that the technology is now mature enough to be considered for future space based observatories and experiments.@en

We present the design, fabrication, and full characterisation (sensitivity, beam pattern, and frequency response) of a background limited broadband antenna coupled kinetic inductance detector covering the frequency range from 1.4 to 2.8 THz. This device shows photon noise limited performance with a noise equivalent power of 2.5 × 10-19W/Hz1/2 at 1.55 THz and can be easily scaled to a kilo-pixel array. The measured optical efficiency, beam pattern, and antenna frequency response match very well the simulations.@en

Next generation sub-mm imaging instruments require kilo-pixel focal plane arrays filled with background limited detectors. Microwave kinetic inductance detectors (MKIDs) are a state-of-the-art detector for future instruments due to their inherent multiplexing capabilities. An MKID consists of a superconducting resonator coupled to a feed-line that is used for readout. In the device presented here radiation coupling is achieved by coupling the MKID directly to a planar antenna. The antenna is placed in the focus of an extended hemispherical lens to increase the filling factor and to match efficiently to fore optics. In this paper, we present the design and the optical performance of MKIDs optimized for operation in a 100-GHz band around 850 GHz. We have measured the coupling efficiency, frequency response, and beam patterns and compare those results to simulated performance. We obtain an excellent agreement between the measured and simulated beam pattern, frequency response, and absolute coupling efficiency between a thermal calibration source and the power absorbed in the detector. Additionally, we demonstrate that antenna coupled MKIDs offer background limited radiation detection down to ∼100 aW of power absorbed in the detector.@en

We present the development of a background-limited kilo-pixel imaging array of ultrawide bandwidth kinetic inductance detectors (KIDs) suitable for space-based THz astronomy applications. The array consists of 989 KIDs, in which the radiation is coupled to each KID via a leaky lens antenna, covering the frequency range between 1.4 and 2.8 THz. The single pixel performance is fully characterised using a representative small array in terms of sensitivity, optical efficiency, beam pattern and frequency response, matching very well its expected performance. The kilo-pixel array is characterised electrically, finding a yield larger than 90% and an averaged noise-equivalent power lower than 3 × 10- 19 W/Hz1 / 2. The interaction between the kilo-pixel array and cosmic rays is studied, with an expected dead time lower than 0.6% when operated in an L2 or a similar far-Earth orbit.@en

Superconducting resonators and transmission lines are fundamental building blocks of integrated circuits for millimeter-submillimeter astronomy. Accurate simulation of radiation loss from the circuit is crucial for the design of these circuits because radiation loss increases with frequency, and can thereby deteriorate the system performance. Here we show a stratification for a 2.5-dimensional method-of-moment simulator Sonnet EM that enables accurate simulations of the radiative resonant behavior of submillimeter-wave coplanar resonators and straight coplanar waveguides (CPWs). The Sonnet simulation agrees well with the measurement of the transmission through a coplanar resonant filter at 374.6 GHz. Our Sonnet stratification utilizes artificial lossy layers below the lossless substrate to absorb the radiation, and we use co-calibrated internal ports for de-embedding. With this type of stratification, Sonnet can be used to model superconducting millimeter-submillimeter wave circuits even when radiation loss is a potential concern.@en

Microwave kinetic inductance detectors (MKIDs) promise high sensitivity, combined with device simplicity and intrinsic multiplexibility. We demonstrate in this paper the realization of an imaging system consisting of an array of 961 antenna-coupled MKIDs that is read out using a single pair of coax cables and an analogue-digital back-end with a 2 GHz readout bandwidth. We measure the optical NEP of the central pixels of the array and find NEP = 510 -19 w/Vhz. The electrical NEP is measured for all pixels, giving NEP = 3.3 ± 1.310 -19 W/VHz for 85% of the pixels. We further obtain an instantaneous dynamic range of a factor 1000 and a cosmic ray dead time of 0.5% in the lab, resulting in 25% dead time when operated in a spacecraft at L2.@en

Microwave kinetic inductance detectors (MKIDs) promise high sensitivity, combined with device simplicity and intrinsic multiplexibility. We demonstrate in this paper the realization of an imaging system consisting of an array of 961 antenna-coupled MKIDs that is read out using a single pair of coax cables and an analogue-digital back-end with a 2 GHz readout bandwidth. We measure the optical NEP of the central pixels of the array and find NEP = 510 -19 w/Vhz. The electrical NEP is measured for all pixels, giving NEP = 3.3 ± 1.310 -19 W/VHz for 85% of the pixels. We further obtain an instantaneous dynamic range of a factor 1000 and a cosmic ray dead time of 0.5% in the lab, resulting in 25% dead time when operated in a spacecraft at L2.@en

Large ultrasensitive detector arrays are needed for present and future observatories for far infrared, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled microwave kinetic inductance detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the ∼-30-dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is at a similar level to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor >10. With the on-chip stray light absorber, the point source response is close to simulations down to the ∼ -35-dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck, we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.@en

Large ultrasensitive detector arrays are needed for present and future observatories for far infrared, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled microwave kinetic inductance detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the ∼-30-dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is at a similar level to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor >10. With the on-chip stray light absorber, the point source response is close to simulations down to the ∼ -35-dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck, we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.@en

We present results from the first vector beam pattern measurement of microwave kinetic inductance detectors (MKIDs). Vector beam patterns require sampling of the E-field of the receiver in both amplitude and phase. MKIDs are inherently direct detectors and have no phase response to incoming radiation. We map the amplitude and phase patterns of the detector beam profile by adapting a two-source heterodyne technique. Our testing strategy recovers the phase information by creating a reference signal to trigger data acquisition. The reference is generated by mixing the slightly offset low-frequency signals from the output of the two synthesizers used to drive the submillimeter sources. The key requirement is that the time-series record always begins at the same set phase of the reference signal. As the source probe is scanned within the receiver beam, the wavefront propagation phase of the receiver changes and causes a phase offset between the detector output and reference signals. We demonstrated this technique on the central pixel of a test array operating at 350 GHz. This methodology will enable vector beam pattern measurements to be performed on direct detectors, which have distinct advantages reducing systematic sources of error, allowing beam propagation, and removing the far-field measurement requirement such that complicated optical systems can be measured at a point that is easily accessible, including the near field.@en

We present results from the first vector beam pattern measurement of microwave kinetic inductance detectors (MKIDs). Vector beam patterns require sampling of the E-field of the receiver in both amplitude and phase. MKIDs are inherently direct detectors and have no phase response to incoming radiation. We map the amplitude and phase patterns of the detector beam profile by adapting a two-source heterodyne technique. Our testing strategy recovers the phase information by creating a reference signal to trigger data acquisition. The reference is generated by mixing the slightly offset low-frequency signals from the output of the two synthesizers used to drive the submillimeter sources. The key requirement is that the time-series record always begins at the same set phase of the reference signal. As the source probe is scanned within the receiver beam, the wavefront propagation phase of the receiver changes and causes a phase offset between the detector output and reference signals. We demonstrated this technique on the central pixel of a test array operating at 350 GHz. This methodology will enable vector beam pattern measurements to be performed on direct detectors, which have distinct advantages reducing systematic sources of error, allowing beam propagation, and removing the far-field measurement requirement such that complicated optical systems can be measured at a point that is easily accessible, including the near field.@en

We present a lab-on-chip experiment to accurately measure losses of superconducting microstrip lines at microwave and submillimeter wavelengths. The microstrips are fabricated from Nb-Ti-N, which is deposited using reactive magnetron sputtering, and amorphous silicon which is deposited using plasma-enhanced chemical vapor deposition (PECVD). Submillimeter wave losses are measured using on-chip Fabry-Perot resonators (FPRs) operating around 350 GHz. Microwave losses are measured using shunted half-wave resonators with an identical geometry and fabricated on the same chip. We measure a loss tangent of the amorphous silicon at single-photon energies of tan⁡δ=3.7±0.5×10-5 at approximately 6GHz and tan⁡δ=2.1±0.1×10-4 at 350 GHz. These results represent very low losses for deposited dielectrics, but the submillimeter wave losses are significantly higher than the microwave losses, which cannot be understood using the standard two-level system loss model.@en

We present a "mix-and-match"process to create large structures with submicrometer features by combining UV contact lithography and 100 kV electron-beam lithography in a single layer of negative-tone resist: Micro-Resist-Technology ma-N1405. The resist is successfully applied for the fabrication of an on-chip terahertz spectrometer, where the design requires 450 nm wide lines and 300 nm wide trenches in a 150 nm thick niobium-titanium-nitride layer, tolerating errors of ± 30 nm. We use a resist thickness of 500 nm, optimized to allow reliable SF 6/O 2-based reactive ion etching of structures with 30 nm accuracy. We find that resist requires an electron-beam cross-linking dose of 1100 μ C / c m 2 for an acceleration voltage of 100 kV in combination with a 180 s 100 °C bake on a hot plate and 45 s development. The smallest resist bars made with our dedicated recipe are 100 nm wide, with the smallest gaps about 300 nm. The difference between the designed and realized feature size is between 2 and 30 nm for structures up to 700 nm wide. The optical exposure dose is 300 m J / c m 2 for the same development time and is optimized to produce a positive sloped edge profile allowing good step coverage for subsequent layers. The resist can be applied, shipped, and processed in a time span of a couple of days without notable deterioration of patterning quality. @en

For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with a detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of ∼960 pixels and fabricated on monolithic 55 mm × 55 mm × 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference, an array with a low Tc superconducting film as a phonon absorber on the opposite side of the substrate, and arrays with MKIDs on membranes. The idea is that the low Tc layer down converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1% for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers.@en

Advances in far infrared astronomy have been, and will be, defined by instrument capabilities. Especially relevant is the development of imaging spectrometers for the wavelength range of 0.03-3 mm, which are not available at all at this moment. We will discuss recent advances in this field: First, we discuss the development of miniature on-chip spectrometers, that can operate in a 0.09-1 THz by using lossless superconducting circuits to create miniature spectrometers. For higher frequencies this is not possible due to material limitations, moreover instruments have to be operated in space due to the opacity of the atmosphere. Recent proposals for new missions focus on space-based observatories with optics cooled down to 4K, which offer unprecedented spectral imaging speeds, but require large arrays of extremely sensitive detectors. In the second part of this paper we will discuss the development of microwave Kinetic Inductance detectors with a sensitivity of NEP. 3.1.10-20 W/ãHz, sufficient for these applications.@en