Aims. Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1-10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in observing speed of many orders of magnitude. A spectroscopic instrument on such an observatory requires large arrays of detectors with a sensitivity expressed as a noise equivalent power NEP = 3 × 10-20 W√ p Hz. Methods. We present the design, fabrication, and characterisation of microwave kinetic inductance detectors (MKIDs) for this frequency range reaching the required sensitivity. The devices are based on thin-film NbTiN resonators which use lens-antenna coupling to a submicron-width aluminium transmission line at the shorted end of the resonator where the radiation is absorbed. We optimised the MKID geometry for a low NEP by using a small aluminium volume of ≈1 μm3 and fabricating the aluminium section on a very thin (100 nm) SiN membrane. Both methods of optimisation also reduce the effect of excess noise by increasing the responsivity of the device, which is further increased by reducing the parasitic geometrical inductance of the resonator. Results. We measure the sensitivity of eight MKIDs with respect to the power absorbed in the detector using a thermal calibration source filtered in a narrow band around 1.5 THz. We obtain a NEPexp(Pabs) = 3:1 ± 0:9 × 10-20 W√ p Hz at a modulation frequency of 200 Hz averaged over all measured MKIDs. The NEP is limited by quasiparticle trapping. Conclusions. The measured sensitivity is sufficient for spectroscopic observations from future, actively cooled space-based observatories. Moreover, the presented device design and assembly can be adapted for frequencies up to ≈10 THz and can be readily implemented in kilopixel arrays. @en

Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below 10−5 for a resonator energy of 105 photons, at 120 mK and 4–7 GHz. This makes these films promising for microwave kinetic inductance detectors and on-chip millimeter-submilimeter filters.@en

In this paper, we present a quasi-optical power distribution architecture based on the use of an integrated lens antenna that generates a uniform aperture field distribution. By using such distribution in combination with an integrated lens array, an efficient and scalable quasi-optical power distribution can be achieved at THz frequencies. The proposed architecture is based on a leaky-wave waveguide feed that illuminates an elliptical lens with a top-hat distribution. This method can distribute the power from one antenna to a 7-pixel lens array in a hexagonal configuration with a power coupling efficiency of nearly 60%. This scheme could be potentially used for the local oscillator power distribution in heterodyne THz arrays. A prototype at 450-615GHz has been developed and characterized, achieving an aperture efficiency higher than 80%. @en

Aims. Future astrophysics and cosmic microwave background space missions operating in the far-infrared to millimetre part of the spectrum will require very large arrays of ultra-sensitive detectors in combination with high multiplexing factors and efficient low-noise and low-power readout systems. We have developed a demonstrator system suitable for such applications. Methods. The system combines a 961 pixel imaging array based upon Microwave Kinetic Inductance Detectors (MKIDs) with a readout system capable of reading out all pixels simultaneously with only one readout cable pair and a single cryogenic amplifier. We evaluate, in a representative environment, the system performance in terms of sensitivity, dynamic range, optical efficiency, cosmic ray rejection, pixel-pixel crosstalk and overall yield at an observation centre frequency of 850 GHz and 20% fractional bandwidth. Results. The overall system has an excellent sensitivity, with an average detector sensitivity (NEPdet) =3 × 10-19 W/Hz measured using a thermal calibration source. At a loading power per pixel of 50 fW we demonstrate white, photon noise limited detector noise down to 300 mHz. The dynamic range would allow the detection of ~1 Jy bright sources within the field of view without tuning the readout of the detectors. The expected dead time due to cosmic ray interactions, when operated in an L2 or a similar far-Earth orbit, is found to be <4%. Additionally, the achieved pixel yield is 83% and the crosstalk between the pixels is <-30 dB. Conclusions. This demonstrates that MKID technology can provide multiplexing ratios on the order of a 1000 with state-of-the-art single pixel performance, and that the technology is now mature enough to be considered for future space based observatories and experiments.@en

Next generation sub-mm imaging instruments require kilo-pixel focal plane arrays filled with background limited detectors. Microwave kinetic inductance detectors (MKIDs) are a state-of-the-art detector for future instruments due to their inherent multiplexing capabilities. An MKID consists of a superconducting resonator coupled to a feed-line that is used for readout. In the device presented here radiation coupling is achieved by coupling the MKID directly to a planar antenna. The antenna is placed in the focus of an extended hemispherical lens to increase the filling factor and to match efficiently to fore optics. In this paper, we present the design and the optical performance of MKIDs optimized for operation in a 100-GHz band around 850 GHz. We have measured the coupling efficiency, frequency response, and beam patterns and compare those results to simulated performance. We obtain an excellent agreement between the measured and simulated beam pattern, frequency response, and absolute coupling efficiency between a thermal calibration source and the power absorbed in the detector. Additionally, we demonstrate that antenna coupled MKIDs offer background limited radiation detection down to ∼100 aW of power absorbed in the detector.@en

We present the development of a background-limited kilo-pixel imaging array of ultrawide bandwidth kinetic inductance detectors (KIDs) suitable for space-based THz astronomy applications. The array consists of 989 KIDs, in which the radiation is coupled to each KID via a leaky lens antenna, covering the frequency range between 1.4 and 2.8 THz. The single pixel performance is fully characterised using a representative small array in terms of sensitivity, optical efficiency, beam pattern and frequency response, matching very well its expected performance. The kilo-pixel array is characterised electrically, finding a yield larger than 90% and an averaged noise-equivalent power lower than 3 × 10- 19 W/Hz1 / 2. The interaction between the kilo-pixel array and cosmic rays is studied, with an expected dead time lower than 0.6% when operated in an L2 or a similar far-Earth orbit.@en

Large ultrasensitive detector arrays are needed for present and future observatories for far infrared, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled microwave kinetic inductance detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the ∼-30-dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is at a similar level to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor >10. With the on-chip stray light absorber, the point source response is close to simulations down to the ∼ -35-dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck, we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.@en

Large ultrasensitive detector arrays are needed for present and future observatories for far infrared, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled microwave kinetic inductance detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the ∼-30-dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is at a similar level to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor >10. With the on-chip stray light absorber, the point source response is close to simulations down to the ∼ -35-dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck, we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.@en

A novel pulsed photoconductive THz source is presented that is able to radiate mW-level average powers, over a large bandwidth by exploiting both the optical and electrical properties of photoconductive sources and the ultrawideband properties of connected antenna arrays. An optical system composed of a micro-lenses array splits the laser beam into N × N spots that host the active excitation of the antenna arrays. An 'ad hoc' network has been adopted to bias the array active spots in order to implement a connected antenna array configuration. The array feeds a silicon lens to increase the directivity of the radiated THz beam. A slot array prototype has been designed, fabricated, and measured. The proposed solutions achieve excellent power radiation levels by making use of an accurate electromagnetic design. This solution can offer enhancements to any active system relying on pulsed photoconductive antennas.@en

A novel pulsed photoconductive THz source is presented that is able to radiate mW-level average powers, over a large bandwidth by exploiting both the optical and electrical properties of photoconductive sources and the ultrawideband properties of connected antenna arrays. An optical system composed of a micro-lenses array splits the laser beam into N × N spots that host the active excitation of the antenna arrays. An 'ad hoc' network has been adopted to bias the array active spots in order to implement a connected antenna array configuration. The array feeds a silicon lens to increase the directivity of the radiated THz beam. A slot array prototype has been designed, fabricated, and measured. The proposed solutions achieve excellent power radiation levels by making use of an accurate electromagnetic design. This solution can offer enhancements to any active system relying on pulsed photoconductive antennas.@en

A novel pulsed photoconductive THz source is presented that is able to radiate mW-level average powers, over a large bandwidth by exploiting both the optical and electrical properties of photoconductive sources and the ultrawideband properties of connected antenna arrays. An optical system composed of a micro-lenses array splits the laser beam into N × N spots that host the active excitation of the antenna arrays. An 'ad hoc' network has been adopted to bias the array active spots in order to implement a connected antenna array configuration. The array feeds a silicon lens to increase the directivity of the radiated THz beam. A slot array prototype has been designed, fabricated, and measured. The proposed solutions achieve excellent power radiation levels by making use of an accurate electromagnetic design. This solution can offer enhancements to any active system relying on pulsed photoconductive antennas.@en

We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.@en

Far infra-red, mm and sub-mm astronomy requires very large arrays of detectors for future wide field cameras and spectrometers. We present an array of lens-antenna coupled Microwave Kinetic Inductance Detectors (MKID) for a wide field camera at 350 GHz. We discuss the optimization to maximize the usable detector yield and matching the array to the readout to enable array performance close to the background limit. We overview the optical characterization techniques required to have confidence in the instrument performance prior to on telescope integration, finally giving measured optical performance for an optimized array.@en

We show the first experimental results which prove that superconducting NbTiN coplanar–waveguide resonators can achieve a loaded Q factor in excess of 800 in the 350 GHz band. These resonators can be used as narrow band pass filters for on-chip filter bank spectrometers for astronomy. Moreover, the low-loss coplanar waveguide technology provides an interesting alternative to microstrip lines or constructing large scale submillimeter wave electronics in general.@en