Lossless Matching Layer for Silicon Lens Arrays At 500 GHz Using Laser Ablated Structures

Journal Article (2022)
Author(s)

Juan Bueno Lopez (TU Delft - Electronics)

Sjoerd Bosma (TU Delft - Tera-Hertz Sensing)

Tobias Bußkamp-Alda (Veld Laser Innovations B.V.)

Maria Alonso Del Pino (TU Delft - Tera-Hertz Sensing)

Nuria Llombart (TU Delft - Tera-Hertz Sensing)

DOI related publication
https://doi.org/10.1109/TTHZ.2022.3202031 Final published version
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Publication Year
2022
Language
English
Issue number
6
Volume number
12
Pages (from-to)
667 - 672
Downloads counter
343
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Abstract

We present the design, fabrication and characterization of a broadband lossless matching layer for silicon lens arrays. The proposed matching layer is based on silicon frusta (truncated pyramids) on top of the lens array fabricated by means of laser ablation. This matching layer is advantageous over quarter-wavelength dielectric matching layers since it covers more than an octave of bandwidth. We compare the performance of this matching layer with the commonly-used parylene-C matching layer at the center of the targetted band (500 GHz) in a lens-antenna integrated system. We measure a 1.6 dB higher transmission of the proposed silicon frusta matching compared to the parylene-C matching layer.

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