Broadband Lossless Matching Layer for Lens Arrays at THz Frequencies

Conference paper (2022)

Authors

J. Bueno Lopez Electronics - EEMCS
S. Bosma Tera-Hertz Sensing - EEMCS
Tobias Bußkamp-Alda Veld Laser Innovations B.V.
M. Alonso Del Pino Tera-Hertz Sensing - EEMCS
Nuria Llombart Tera-Hertz Sensing - EEMCS
Research Group
Electronics (EEMCS) (TU Delft)
Copyright: © 2022 J. Bueno Lopez, S. Bosma, T. Bußkamp-Alda, M. Alonso Del Pino, Nuria Llombart
DOI
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https://doi.org/10.1109/IRMMW-THz50927.2022.9895659
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Published Date

2022

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

We present the design, fabrication and characterization of a broadband lossless matching layer for shallow lens arrays. The matching layer we propose is based on silicon pyramids fabricated on top of the lens array by means of laser ablation. This matching layer has the advantage that it covers over an octave of bandwidth. We have compared the performance of this matching layer with the commonly used parylene-C matching layer at the center of the targetted band, 500 GHz. The matching layer based on the silicon pyramids has 1.6 dB higher transmission.