Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment

Journal article (2013)

Authors

L. Shi Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
F Scholze External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation