Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment

Journal Article (2013)
Author(s)

L. Shi (TU Delft - Electronic Instrumentation)

Stoyan Nihtianov (TU Delft - Electronic Instrumentation)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

F Scholze (External organisation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/JSEN.2012.2235142
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Instrumentation
Issue number
5
Volume number
13
Pages (from-to)
1699-1707

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