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F Scholze
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Authored
12 records found
Characterization of new EUV stable silicon photodiodes
Poster -
F Scholze
,
C Laubis
,
F Sarubbi
,
L.K. Nanver
,
S. Nihtianova
Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application
Conference paper -
L. Shi
,
S. Nihtianova
,
F Scholze
,
L.K. Nanver
Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes
Conference paper -
L. Shi
,
F Sarubbi
,
S. Nihtianova
,
L.K. Nanver
,
F Scholze
High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges
Conference paper -
L. Shi
,
S. Nihtianova
,
L.K. Nanver
,
F Scholze
,
A Gottwald
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
Conference paper -
F Sarubbi
,
L.K. Nanver
,
T.L.M. Scholtes
,
S. Nihtianova
,
F Scholze
high performance silicon based extreme ultraviolet radiation detector for industrial application
Conference paper -
L. Shi
,
F Sarubbi
,
S. Nihtianova
,
L.K. Nanver
,
T.L.M. Scholtes
,
F Scholze
High-performance DUV/EUV photodiodes in a pure boron doping technology
Conference paper -
F Sarubbi
,
L.K. Nanver
,
T.L.M. Scholtes
,
S. Nihtianova
,
F Scholze
Surface-charge-collection-enhanced high-sensitivity high-stability silicon photodiodes for DUV and VUV spectral ranges
Journal article -
L. Shi
,
S. Nihtianova
,
L Haspeslagh
,
F Scholze
,
A Gottwald
,
L.K. Nanver
Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility
Journal article -
L.K. Nanver
,
L. Qi
,
F Scholze
,
V. Mohammadi
,
C. Mok Kai Rine
,
W.B. de Boer
,
N. Golshani
,
A. Sammak
,
T.L.M. Scholtes
,
A Gottwald
,
U Kroth
Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency
Conference paper -
L. Shi
,
L.K. Nanver
,
C Laubis
,
F Scholze
,
S. Nihtianova
Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment
Journal article -
L. Shi
,
S. Nihtianova
,
L.K. Nanver
,
F Scholze
Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes
Journal article -
L. Shi
,
S. Nihtianova
,
S. Xia
,
L.K. Nanver
,
A Gottwald
,
F Scholze