12 records found
1
Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility
Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment
Surface-charge-collection-enhanced high-sensitivity high-stability silicon photodiodes for DUV and VUV spectral ranges
Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes
Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application
Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency
High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges
high performance silicon based extreme ultraviolet radiation detector for industrial application
Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
Characterization of new EUV stable silicon photodiodes
High-performance DUV/EUV photodiodes in a pure boron doping technology