High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges
Conference Paper
(2011)
Author(s)
L Shi (TU Delft - Electronic Instrumentation)
S. Nihtianova (TU Delft - Electronic Instrumentation)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
F Scholze (External organisation)
Lukas M. Gottwald (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:7de624a8-ada2-4556-9b5f-219a712df554
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-9
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