Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes

Journal article (2012)

Authors

L. Shi Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
S. Xia Electronic Instrumentation - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
A Gottwald External organisation
F Scholze External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation