Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes
Journal Article
(2012)
Author(s)
L. Shi (TU Delft - Electronic Instrumentation)
S. Nihtianova (TU Delft - Electronic Instrumentation)
S Xia (TU Delft - Electronic Instrumentation)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Lukas M. Gottwald (External organisation)
F Scholze (External organisation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/TIM.2012.2187029
To reference this document use:
https://resolver.tudelft.nl/uuid:04313133-674c-4bfa-b2e6-3e578fcd399e
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Instrumentation
Issue number
5
Volume number
61
Pages (from-to)
1268-1277
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