Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency

Conference paper (2011)

Authors

L. Shi Electronic Instrumentation - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
C Laubis External organisation
F Scholze External organisation
S. Nihtianova Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation