Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency
Conference Paper
(2011)
Author(s)
L Shi (TU Delft - Electronic Instrumentation)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
C Laubis (External organisation)
F Scholze (External organisation)
Stoyan Nihtianov (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/TRANSDUCERS.2011.5969130
To reference this document use:
https://resolver.tudelft.nl/uuid:ff38c533-45b2-4064-9bcb-bd30ab32ae3e
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
48-51
ISBN (print)
978-1-4577-0156-6
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