high performance silicon based extreme ultraviolet radiation detector for industrial application
Conference Paper
(2009)
Author(s)
L Shi (TU Delft - Electronic Instrumentation)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
S. Nihtianova (TU Delft - Electronic Instrumentation)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
F Scholze (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:2d2ec005-0f89-40a4-ad68-e372e0aa5866
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
1891-1896
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