Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes

Conference Paper (2009)
Author(s)

L. Shi (TU Delft - Electronic Instrumentation)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

S. Nihtianova (TU Delft - Electronic Instrumentation)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

F Scholze (External organisation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
530-533
ISBN (print)
978-90-73461-62-8

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