Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application

Conference Paper (2012)
Author(s)

L. Shi (TU Delft - Electronic Components, Technology and Materials)

Stoyan Nihtianov (TU Delft - Electronic Instrumentation)

F Scholze (External organisation)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/IECON.2012.6389260
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
3952-3957
ISBN (print)
978-1-4673-2419-9

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