Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application

Conference paper (2012)

Authors

L. Shi Electronic Components, Technology and Materials - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
F Scholze External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials