High-performance DUV/EUV photodiodes in a pure boron doping technology
Conference Paper
(2008)
Author(s)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Old - EWI Sect. ECTM)
S. Nihtianova (TU Delft - Electronic Instrumentation)
F Scholze (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f7f3898c-4ca3-42bd-9253-5aed94d93561
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
588-591
ISBN (print)
978-90-73461-56-7
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