Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

L. Qi (TU Delft - Electronic Components, Technology and Materials)

V. Mohammadi (TU Delft - Electronic Components, Technology and Materials)

C Mok Kai Rine (TU Delft - Electronic Components, Technology and Materials)

WB de Boer (TU Delft - Old - EWI Sect. ECTM)

N Golshani (TU Delft - Electronic Components, Technology and Materials)

A. Sammak (TU Delft - Electronic Components, Technology and Materials)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

A Gottwald (External organisation)

U Kroth (External organisation)

F Scholze (External organisation)