Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Journal article (2014)

Authors

L.K. Nanver Electronic Components, Technology and Materials -

L. Qi Electronic Components, Technology and Materials -

F Scholze External organisation

V. Mohammadi Electronic Components, Technology and Materials -

C. Mok Kai Rine Electronic Components, Technology and Materials -

W.B. de Boer Old - EWI Sect. ECTM

N. Golshani Electronic Components, Technology and Materials -

A. Sammak Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

A Gottwald External organisation

U Kroth External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

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http://resolver.tudelft.nl/uuid:f49139e4-8691-4f82-8cbc-53ffe85f91aa

Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials