Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

L Qi (TU Delft - Electronic Components, Technology and Materials)

V Mohammadi (TU Delft - Electronic Components, Technology and Materials)

C Mok Kai Rine (TU Delft - Electronic Components, Technology and Materials)

W.B. de Boer (Old - EWI Sect. ECTM)

N Golshani (TU Delft - Electronic Components, Technology and Materials)

Amir Sammak (TU Delft - Electronic Components, Technology and Materials)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

Lukas M. Gottwald (External organisation)

U Kroth (External organisation)

F Scholze (External organisation)