Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
Conference Paper
(2008)
Author(s)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
S. Nihtianova (TU Delft - Electronic Instrumentation)
F Scholze (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:8151eb6d-3ab5-4b5f-a17d-dbcb8dc3ca66
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
278-281
ISBN (print)
978-1-4244-2363-7
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