Stress in AlNiCr films and stacks of films

Conference paper (1997)

Authors

JP Lokker QN/Fysics of NanoElectronics
JF Jongste External organisation
DJ de Boer External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
Research Group
QN/Fysics of NanoElectronics
More Info
expand_more

Published Date

1997

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

QN/Fysics of NanoElectronics