Stress in AlNiCr films and stacks of films
Conference Paper
(1997)
Author(s)
JP Lokker (TU Delft - QN/Fysics of NanoElectronics)
JF Jongste (External organisation)
DJ de Boer (External organisation)
Guido Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:01326fa0-d790-4624-b25f-61b3c52199a0
More Info
expand_more
expand_more
Publication Year
1997
Research Group
QN/Fysics of NanoElectronics
Pages (from-to)
371-383
No files available
Metadata only record. There are no files for this record.