Ultra-high depth resolution SIMS with sub-kev grazing O2+ beams
Conference Paper
(1997)
Author(s)
P. F.A. Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
ZX Jiang (External organisation)
CCG Visser (External organisation)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
WM Arnoldbik (External organisation)
Research Group
Old - sect Electronic Materials (NS/EM)
To reference this document use:
https://resolver.tudelft.nl/uuid:058fd974-f886-4a07-9289-34e51a7a16a8
More Info
expand_more
expand_more
Publication Year
1997
Research Group
Old - sect Electronic Materials (NS/EM)
Pages (from-to)
13.1-13.7
No files available
Metadata only record. There are no files for this record.