Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

Journal article (2014)

Authors

N. Golshani Electronic Components, Technology and Materials - EEMCS
V. Mohammadi Electronic Components, Technology and Materials - EEMCS
H. Schellevis Electronic Components, Technology and Materials - EEMCS
C.I.M. Beenakker Electrical Engineering, Mathematics and Computer Science
R. Ishihara Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials