Library
local_library Home Repository

Sensitive capacitive pressure sensors based on graphene membrane arrays

Journal Article (2020)
Author(s)

M. Siskins (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab)

M. Lee (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab)

D. Wehenkel (Applied Nanolayers)

R. van Rijn (TU Delft - EKL-Users, Applied Nanolayers)

Tijmen W. de Jong (Student TU Delft, Kavli institute of nanoscience Delft)

Johannes R. Renshof (Kavli institute of nanoscience Delft, Student TU Delft)

Berend C. Hopman (Kavli institute of nanoscience Delft, Student TU Delft)

Willemijn S.J.M. Peters (Kavli institute of nanoscience Delft, Student TU Delft)

D. Davidovikj (Kavli institute of nanoscience Delft, TU Delft - QN/van der Zant Lab, TU Delft - QN/Steeneken Lab)

H.S.J. van der Zant (Kavli institute of nanoscience Delft, TU Delft - QN/van der Zant Lab)

P.G. Steeneken (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab, TU Delft - Dynamics of Micro and Nano Systems)

Research Group
QN/Steeneken Lab
Copyright
© 2020 M. Siskins, M. Lee, D. Wehenkel, R. van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S.J.M. Peters, D. Davidovikj, H.S.J. van der Zant, P.G. Steeneken
DOI related publication
https://doi.org/10.1038/s41378-020-00212-3
More Info
expand_more
Publication Year
2020
Language
English
Copyright
© 2020 M. Siskins, M. Lee, D. Wehenkel, R. van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S.J.M. Peters, D. Davidovikj, H.S.J. van der Zant, P.G. Steeneken
Research Group
QN/Steeneken Lab
Issue number
1
Volume number
6
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.