Measuring in-thickness mechanical properties of sub micron polymer dielectric films

Conference Paper (2006)
Author(s)

M van Soestbergen (TU Delft - Computational Design and Mechanics)

LJ Ernst (TU Delft - Computational Design and Mechanics)

Kaspar M B Jansen (TU Delft - Computational Design and Mechanics)

Willem Dirk van van Driel (TU Delft - Dynamics of Micro and Nano Systems)

M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

A Polyakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

Research Group
Computational Design and Mechanics
More Info
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Publication Year
2006
Research Group
Computational Design and Mechanics
Pages (from-to)
1-5
ISBN (print)
1-4244-0272X

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