Measuring in-thickness mechanical properties of sub micron polymer dielectric films
Conference Paper
(2006)
Author(s)
M van Soestbergen (TU Delft - Computational Design and Mechanics)
LJ Ernst (TU Delft - Computational Design and Mechanics)
Kaspar M B Jansen (TU Delft - Computational Design and Mechanics)
Willem Dirk van van Driel (TU Delft - Dynamics of Micro and Nano Systems)
M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
A Polyakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Computational Design and Mechanics
To reference this document use:
https://resolver.tudelft.nl/uuid:060cdd98-c5fa-470c-a99c-9d4410122106
More Info
expand_more
expand_more
Publication Year
2006
Research Group
Computational Design and Mechanics
Pages (from-to)
1-5
ISBN (print)
1-4244-0272X
No files available
Metadata only record. There are no files for this record.