A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers

Journal Article (2011)
Author(s)

René H. Poelma (TU Delft - Electronic Components, Technology and Materials)

H Sadeghian Marnani (TU Delft - Computational Design and Mechanics)

S.P.M. Noijen (TU Delft - Computational Design and Mechanics)

JJM Zaal (TU Delft - Computational Design and Mechanics)

Guogi Zhang (TU Delft - Computational Design and Mechanics)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1088/0960-1317/21/6/065003
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
6
Volume number
21
Pages (from-to)
1-11

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