Spatial dispersion of crystals as a critical problem for deep UV lithography
Journal Article
(2003)
Author(s)
A Serebriakov (TU Delft - ImPhys/Optics)
F Bociort (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0849f1cf-862f-4cca-96e6-97586b345d53
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Publication Year
2003
Research Group
ImPhys/Optics
Issue number
8
Volume number
70
Pages (from-to)
566-569
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