A

A Serebriakov

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14 records found

Optical system optimization based on the network structure of local minima
Conference paper - A Serebriakov, F. Bociort, J.J.M. Braat

Networks of local minima in optical system optimization
Journal article - F. Bociort, E van Driel, A Serebriakov

The effect of intrinsic birefringence in deep UV-lithography

Design of lithographic objectives including the effect of spatially induced birefringence

Spatial dispersion of crystals as a critical problem for deep UV lithography
Journal article - A Serebriakov, F. Bociort, J.J.M. Braat

Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.

Topography of merit function landscape in optical system design
Journal article - E van Driel, F. Bociort, A Serebriakov

Network structure of the set of local minima in optical system optimization
Journal article - F. Bociort, E van Driel, A Serebriakov

Topography of the merit function landscape in optical system design
Journal article - E van Driel, F. Bociort, A Serebriakov

Saddle points in the merit function landscape of systems of thin lenses in contact

Finding new local minima by switching merit functions in optical system optimization.
Journal article - A Serebriakov, F. Bociort, J.J.M. Braat

Correction of the phse retardation caused by intrinsic birefringence in dep UV-Lithography
Journal article - A Serebriakov, F. Bociort, J.J.M. Braat

Compensation of the birefringence induced by spartial dispersion in 157 nm
Conference paper - A Serebriakov, F. Bociort, J.J.M. Braat

Optimization and analysis of deep UV imaging systems
Doctoral thesis - A Serebriakov