14 records found
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Optimization and analysis of deep UV imaging systems
Finding new local minima by switching merit functions in optical system optimization.
Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.
Correction of the phse retardation caused by intrinsic birefringence in dep UV-Lithography
Topography of the merit function landscape in optical system design
The effect of intrinsic birefringence in deep UV-lithography
Networks of local minima in optical system optimization
Saddle points in the merit function landscape of systems of thin lenses in contact
Spatial dispersion of crystals as a critical problem for deep UV lithography
Network structure of the set of local minima in optical system optimization
Design of lithographic objectives including the effect of spatially induced birefringence
Optical system optimization based on the network structure of local minima
Topography of merit function landscape in optical system design
Compensation of the birefringence induced by spartial dispersion in 157 nm