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A Serebriakov

14 records found

Optimization and analysis of deep UV imaging systems
Doctoral thesis (2005) - A Serebriakov (author)

Finding new local minima by switching merit functions in optical system optimization.

Correction of the phse retardation caused by intrinsic birefringence in dep UV-Lithography

Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.

Saddle points in the merit function landscape of systems of thin lenses in contact

Topography of the merit function landscape in optical system design

The effect of intrinsic birefringence in deep UV-lithography

Networks of local minima in optical system optimization

Topography of merit function landscape in optical system design

Spatial dispersion of crystals as a critical problem for deep UV lithography

Network structure of the set of local minima in optical system optimization

Compensation of the birefringence induced by spartial dispersion in 157 nm

Optical system optimization based on the network structure of local minima

Design of lithographic objectives including the effect of spatially induced birefringence