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E. Maksimov
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3 records found
The effect of intrinsic birefringence in deep UV-lithography
Journal article -
A Serebriakov
,
E. Maksimov
,
F. Bociort
,
J.J.M. Braat
Design of lithographic objectives including the effect of spatially induced birefringence
Journal article -
A Serebriakov
,
E. Maksimov
,
F. Bociort
,
J.J.M. Braat
Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.
Journal article -
A Serebriakov
,
E. Maksimov
,
F. Bociort
,
J.J.M. Braat