E. Maksimov | TU Delft Repository

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E. Maksimov

Journal article (3)

3 records found

1

Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.

Journal article (2005) - A Serebriakov (author) , E. Maksimov (author) , Florian Bociort (author) , J.J.M. Braat (author)

The effect of intrinsic birefringence in deep UV-lithography

Journal article (2004) - A Serebriakov (author) , E. Maksimov (author) , Florian Bociort (author) , J.J.M. Braat (author)

Design of lithographic objectives including the effect of spatially induced birefringence

Journal article (2003) - A Serebriakov (author) , E. Maksimov (author) , Florian Bociort (author) , J.J.M. Braat (author)