The effect of intrinsic birefringence in deep UV-lithography
Journal Article
(2004)
Author(s)
A Serebriakov (TU Delft - ImPhys/Optics)
E. Maksimov (External organisation)
F. Bociort (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:11a4f00b-128e-403c-ae9c-440bd0c88a09
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Publication Year
2004
Research Group
ImPhys/Optics
Volume number
5249
Pages (from-to)
624-626
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