Design of lithographic objectives including the effect of spatially induced birefringence
Journal Article
(2003)
Author(s)
A Serebriakov (TU Delft - ImPhys/Optics)
E. Maksimov (External organisation)
F. Bociort (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:0cc447d3-05cd-4332-a6cb-30d42a3655c7
More Info
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Publication Year
2003
Research Group
ImPhys/Optics
Volume number
5249
Pages (from-to)
624-635
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