Correction of the phse retardation caused by intrinsic birefringence in dep UV-Lithography
Journal Article
(2005)
Author(s)
A Serebriakov (TU Delft - ImPhys/Optics)
F Bociort (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:8b5481fa-e264-4b84-ba91-c64c6590fcf7
More Info
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Publication Year
2005
Research Group
ImPhys/Optics
Volume number
5754
Pages (from-to)
1780-1791
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