Proximity effect in ion-beam-induced deposition of nanopillars
Journal Article
(2009)
Author(s)
P Chen (TU Delft - QN/High Resolution Electron Microscopy)
Huub Salemink (TU Delft - QN/Photronic Devices)
Paul F.A. Alkemade (TU Delft - QN/Fysics of NanoElectronics, TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/High Resolution Electron Microscopy
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https://resolver.tudelft.nl/uuid:0886f1f3-a1f4-4b7d-b653-c27045d0c103
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Publication Year
2009
Research Group
QN/High Resolution Electron Microscopy
Issue number
4
Volume number
B27
Pages (from-to)
1838-1843
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