An experimental setup to test the MAPPER electron lithography concept.
Journal Article
(2000)
Author(s)
BJ Kampherbeek (TU Delft - ImPhys/Charged Particle Optics)
MJJ Wieland (TU Delft - ImPhys/Charged Particle Optics)
A. Zuuk (TU Delft - QN/Kavli Nanolab Delft)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:093162fa-e120-462a-9643-255962e1d6bb
More Info
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Publication Year
2000
Research Group
ImPhys/Charged Particle Optics
Issue number
1-4
Volume number
53
Pages (from-to)
279-282
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