Fabrication of a CMOS compatible pressure sensor for harsh environments
Journal Article
(2004)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
HTM Pham (TU Delft - Electronic Components, Technology and Materials)
Paddy J. French (TU Delft - Electronic Instrumentation)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:0ad432f1-2a32-412f-b10e-4131b8c89eea
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Publication Year
2004
Research Group
Electronic Instrumentation
Volume number
14
Pages (from-to)
1478-1483
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