Backwafer optical lithography and wafer distortion in substrate transfer technologies
Conference Paper
(2000)
Author(s)
H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
PWL van Dijk (External organisation)
A Berthold (TU Delft - Electronic Components, Technology and Materials)
T Machielsen (External organisation)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:0b4ab21b-8284-4454-89bf-6e59dfeefc03
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
200-207
ISBN (print)
0-8194-3842-1
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