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T Machielsen

Conference paper (2)

2 records found

1

Backwafer optical lithography and wafer distortion in substrate transfer technologies

Conference paper (2000) - H.W. van Zeijl (author) , JHCM Slabbekoorn (author) , Lis Nanver (author) , PWL van Dijk (author) , A Berthold (author) , T Machielsen (author)

Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

Conference paper (2000) - H.W. van Zeijl (author) , JHCM Slabbekoorn (author) , L. K. Nanver (author) , PWL van Dijk (author) , T Machielsen (author)