Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies
Conference Paper
(2000)
Author(s)
H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
PWL van Dijk (External organisation)
T Machielsen (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:6851c623-343e-4177-8243-85927a8ef9c9
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
163-167
ISBN (print)
90-73461-24-3
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