Formation of location-controlled germanium grains by excimer laser

Conference Paper (2008)
Author(s)

A Baiano (TU Delft - Electronic Components, Technology and Materials)

R. Ishihara (TU Delft - Electronic Components, Technology and Materials)

J. van der Cingel (TU Delft - Old - EWI Sect. ECTM)

Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
153-157
ISBN (print)
978-1-56677-655-4

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