The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Tran, AT; Pandraud, Gregory; Tichelaar, Frans D.; Nguyen, MD; Schellevis, H.; Sarro, PM

The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Journal article (2013)

Authors

AT Tran Electronic Components, Technology and Materials

Gregory Pandraud Electronic Components, Technology and Materials

Frans D. Tichelaar

MD Nguyen External organisation

H. Schellevis Electronic Components, Technology and Materials

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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