MD Nguyen | TU Delft Repository

Library

local_library Home Repository

MN

MD Nguyen

Journal article (2)

2 records found

1

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Journal article (2013) - A.T. Tran (author) , O Wunnicke (author) , G. Pandraud (author) , MD Nguyen (author) , H Schellevis (author) , Pasqualina Sarro (author)

The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Journal article (2013) - AT Tran (author) , Grégory Pandraud (author) , FD Tichelaar (author) , MD Nguyen (author) , H. Schellevis (author) , Pasqualina Maria Sarro (author)