Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Tran, A.T.; Wunnicke, O; Pandraud, Gregory; Nguyen, MD; Schellevis, H; Sarro, P. M.

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Journal article (2013)

Authors

A.T. Tran Electronic Components, Technology and Materials

O Wunnicke External organisation

Gregory Pandraud Electronic Components, Technology and Materials

MD Nguyen External organisation

H Schellevis Electronic Components, Technology and Materials

P. M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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