Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators
Journal Article
(2013)
Author(s)
AT Tran (TU Delft - Electronic Components, Technology and Materials)
O Wunnicke (External organisation)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
MD Nguyen (External organisation)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.sna.2013.01.047
To reference this document use:
https://resolver.tudelft.nl/uuid:66adca23-4f5d-45e4-918d-437396c2ea92
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
November
Volume number
202
Pages (from-to)
118-123
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