Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD
Conference Paper
(2007)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
S Milosavljevic (TU Delft - Electronic Components, Technology and Materials)
W de Boer (External organisation)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:10e89a4f-bbdd-46a8-90c8-aa7a96d93484
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
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